Magnetic shunts in tube targets

摘要

The sputter target has target material (1) arranged on carrier tube (3). The carrier tube has rear surface facing away from the target material. The target material has front surface facing away from the carrier tube. A ferromagnetic material (6) is arranged between front surface of target material and rear surface of carrier tube. The thickness of the ferromagnetic material is varied continuously and steadily along greatest length of the carrier tube.