Micromechanical component for tilting mirror, has electrostatic linear drive to produce thrust or traction force in direction, and has prop, which is coupled with electrostatic linear drive at front end

摘要

The micromechanical component (10) has an electrostatic linear drive to produce a thrust or a traction force in a direction, and has a prop (18), which is coupled with the electrostatic linear drive at front end (20) in certain direction. A solid element (17) is provided, which is bent in another direction perpendicular to former direction. An anchor element (11) is provided, which is connected with the tilted elements (13) over a solid joint (14). The solid joint is made of a semiconductor material or an oxide of a semiconductor material or nitride of a semiconductor material.