发明名称 Illuminating efficiency-increasable and light-erasable embedded memory structure
摘要 An illuminating efficiency-increasable and light-erasable embedded memory structure including a substrate, a memory device, many dielectric layers, many cap layers and at least three metal layers is described. The substrate includes a memory region and a core circuit region. The memory device includes a select gate and a floating gate, and the select gate and the floating gate are disposed adjacently on the substrate in the memory region. The dielectric layers are disposed on the substrate and cover the memory device. The dielectric layers have a first opening located above the floating gate. Each of the cap layers is disposed on each of the dielectric layers, respectively. The metal layers are disposed in the dielectric layers in the core circuit region.
申请公布号 US7544992(B2) 申请公布日期 2009.06.09
申请号 US20070749574 申请日期 2007.05.16
申请人 UNITED MICROELECTRONICS CORP. 发明人 SHIH HUNG-LIN;TSAI WEN-CHING;HUANG YU-HUA
分类号 H01L21/336;H01L29/788 主分类号 H01L21/336
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