| 摘要 |
A system error calibration method of interferometer is provided to correct the measuring result of the wavefront aberration of test lens. A system error calibration method of interferometer comprises: a step of calculating a first aberration function corresponding to the wavefront aberration based on the interference pattern image; a step of calculating a second aberration function corresponding to the wavefront aberration based on the interference figure obtained as to the rotational phase for comparison; a step of calculating a first astigmatism function; a step of calculating a second astigmatism function; and a step of calculating a third astigmatism function.
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