发明名称 Bumping process and bump structure
摘要 A bumping process comprises forming a passivation layer having a planarized surface covering a pad on a substrate, forming a hole penetrating through the passivation layer to expose a contact surface of the pad, and forming a bump on the contact surface and planarized surface. The planarized surface will provide a larger effective area for pressing, thereby minimizing the pad, enhancing the mechanical strength at the peripheral of the pad, providing more selection flexibility for anisotropic conductive film, reducing the possibilities of short circuit and current leakage within the bump gap, and increasing the yield of the pressing process and the conductive quality of the bump.
申请公布号 US7544600(B2) 申请公布日期 2009.06.09
申请号 US20060404750 申请日期 2006.04.17
申请人 ELAN MICROELECTRONICS CORPORATION 发明人 HU CHUN-PING;CHEN CHENG-CHUNG;TSI CHIEN-WEN;LEE YU-CHING
分类号 H01L21/44 主分类号 H01L21/44
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