ELECTROSTATIC CHUCK AND APPARATUS FOR ATTACHING A GLASS SUBSTRATE HAVING THE SAME

摘要

An electrostatic chuck and a substrate attaching device including the same are provided to discharge the air collected between a base unit and a receiving unit to the outside by forming grooves in the base unit. An electrostatic chuck includes a receiving unit(120) and a base unit(110). When a substrate is received in the receiving unit, the receiving unit supports and fixes the substrate by generating an electrostatic force by an external voltage. The base unit is attached to the lower part of the receiving unit. A groove(112) is formed in the base unit for discharging the air collected between the base unit and the receiving unit to the outside.