发明名称 PROBE DEVICE FOR SEMICONDUCTOR
摘要 A probe device for testing a semiconductor is provided to improve yield of a semiconductor and to prevent misalignment by limiting a displacement possibility range of a probe needle within a range of a pad. A probe device for testing a semiconductor includes a probe needle(3), a printed circuit board(1), and a misalignment preventing plate(5). The probe needle is contacted in a pad of a wafer. The printed circuit board tests a pad(8) through the probe needle. The misalignment preventing plate is fixed to a bottom part of the printed circuit board by a supporting bar(6). The misalignment preventing plate includes a window(4) which exposes the probe needle to a bottom part. The misalignment preventing plate limits a displacement generation of the probe needle.
申请公布号 KR20090057748(A) 申请公布日期 2009.06.08
申请号 KR20070124459 申请日期 2007.12.03
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, KYOUNG HWAN
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
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