| 摘要 |
Driving is made possible in a moving range equivalent to or wider than the conventional range, in a range of driving voltages smaller than a pull-in voltage. An electronic element (1) is provided with fixed sections (11, 13), and a movable section (12) arranged to move with respect to the fixed sections (11, 13) and to generate a spring force to return to a prescribed position. The fixed sections (11, 13) are provided with a first driving electrode (32) and a first signal electrode (34). The movable section (12) is provided with a second driving electrode (33) and a second signal electrode (31). An electrostatic force caused by a voltage applied between the first driving electrode (32) and the second driving electrode (33) is generated against the spring force. The first driving electrode (32), the second driving electrode (33), the first signal electrode (34) and the second signal electrode (31) are arranged to generate the electrostatic force in a direction where an interval between the first signal electrode (34) and the second signal electrode (31) increases. |
