| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device improving operating speed while power consumption of an electrostatic actuator is reduced and improving reliability and to provide a control method of the electrostatic actuator. SOLUTION: When the electrostatic actuator 10 changes from an opened state to a closed state, electrostatic capacity increases, and a control circuit 30 of an integrated circuit part 20 detects that operation voltage VACT applied by a voltage generating circuit 40 temporarily drops. When temporary drop of operation voltage VACT is detected, voltage applied by the voltage generating circuit 40 is switched to hold voltage VHOLD. Thus, power consumption of the electrostatic actuator 10 is suppressed and operating speed is improved. Thus, reliability improves. COPYRIGHT: (C)2009,JPO&INPIT
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