CHARGED PARTICLE SOURCE WITH AUTOMATED TIP FORMATION

摘要

PROBLEM TO BE SOLVED: To provide a charged particle source with automated tip formation. SOLUTION: A charged particle device includes: an emitter unit including an emitter tip 13; a voltage supply unit 222 configured to provide a constant voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply component 224 configured to provide a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; measuring units 142, 142', 142" for measuring an emitter characteristic; and a control unit 130 configured to receive a signal from the measuring units, and configured to control the pulsed voltage supply component. COPYRIGHT: (C)2009,JPO&INPIT