发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A semiconductor device and a method of fabricating the same includes a groove formed in a semiconductor substrate, a gate electrode formed in the groove, source/drain regions disposed adjacent sidewalls of the gate electrode, and spacers interposed between the gate electrode and the source/drain regions such that the uppermost surface of the source/drain regions, the uppermost surface of the gate electrode and the uppermost surface of the spacers are formed on the same plane.
申请公布号 US2009140332(A1) 申请公布日期 2009.06.04
申请号 US20080325165 申请日期 2008.11.29
申请人 KIM DAE-KYEUN 发明人 KIM DAE-KYEUN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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