发明名称 Semiconductor device and manufacturing method thereof
摘要 There is formed a gate electrode (word line) via a gate insulating film on a semiconductor substrate, the gate electrode extending in the direction inclining at an angle of approximately 45 degrees to the extending direction of an element region. The element region is divided into three portions by the two gate electrodes. In each element region portion, two MOS transistors are provided. A bit line is connected to a W plug provided in the central region portion and lower electrodes of two ferroelectric capacitors are connected to other W plugs provided in both end region portions. The extending direction of the bit line inclines approximately 45 degrees to the extending direction of the element region.
申请公布号 US2009140306(A1) 申请公布日期 2009.06.04
申请号 US20080314804 申请日期 2008.12.17
申请人 FUJITSU LIMITED 发明人 ANDO TAKASHI
分类号 H01L27/105;H01L27/115;H01L21/00;H01L21/02;H01L21/70;H01L21/8242;H01L21/8246;H01L29/68;H01L29/76 主分类号 H01L27/105
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