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发明名称
VERBESSERTE SAURE CHEMIE FÜR SÄUBERUNG NACH CMP
摘要
申请公布号
DE602005014094(D1)
申请公布日期
2009.06.04
申请号
DE200560014094T
申请日期
2005.01.24
申请人
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
发明人
FISHER, MATTHEW L.;MISRA, ASHUTOSH
分类号
C11D11/00;C11D3/20;C11D3/22;C11D3/28;C11D3/33;C11D3/34;C11D7/26;C11D7/32;C11D7/34;C23G1/10
主分类号
C11D11/00
代理机构
代理人
主权项
地址
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