| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent substrate position measuring apparatus which can measure the edge position of a glass substrate having high light transmittance by a simple, inexpensive configuration with high precision and in a noncontact manner, an exposure apparatus provided with the position measuring apparatus capable of positioning a substrate with high precision, a substrate manufacturing method, and a prealignment apparatus. <P>SOLUTION: The transparent substrate position measuring apparatus comprises a light emitting section 31 for emitting measuring light from a direction inclined with respect to the normal line N of a substrate W, or an object under measurement, and a light receiving section 32 which is arranged opposite to the light emitting section 31 across the substrate W. Positions of edges 20, 21 of the substrate W are measured from a difference in the amount of light received between the measuring light passed through the substrate W and measuring light passed through the outside of the edge of the substrate W, which are received by the light receiving section 32. <P>COPYRIGHT: (C)2009,JPO&INPIT |
