| 摘要 |
PROBLEM TO BE SOLVED: To provide a stamper which is used for a nanostructure transfer apparatus of an optical transfer system, and attains automatic transport and automatic positioning. SOLUTION: The resin stamper is used for UV nanoimprint and comprises a support member made of a light transmitting material and having mechanical strength, an intermediate layer also made of a light transmitting material, and a patterned resin layer which is also made of a light transmitting material, the support member being larger in size than the intermediate layer and the patterned resin layer, the intermediate layer being more flexible than the patterned resin layer, and the patterned resin layer having a pattern of high and low areas formed in a surface thereof that is the obverse of the pattern of high and low areas in a mold. COPYRIGHT: (C)2009,JPO&INPIT |
