| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement apparatus for accurately measuring the position of an object to be measured. SOLUTION: The measurement apparatus 100 is configured to measure a position of the object to be measured using a plurality of signals representing the position of the object to be measured. The measurement apparatus 100 includes a distortion coefficient arithmetic device 11 for calculating a distortion coefficient by comparing each of the plurality of signals with an existing value, a distortion correcting part 2 for generating a plurality of correction signals by correcting the plurality of signals using the distortion coefficient, a square-root of sum of squares arithmetic device 3 which calculates a square-root of sum of squares of the plurality of correction signals generated by the distortion correcting part 2, a first normalizing means which generates a plurality of first normalized signals by dividing each of the correction signals by the square-root of sum of squares, and a phase arithmetic device 6 which calculates the position of the object to be measured based on the first normalized signals calculated by the first normalizing means. COPYRIGHT: (C)2009,JPO&INPIT
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