| 摘要 |
PROBLEM TO BE SOLVED: To achieve a semiconductor tester for reducing a ratio of an overhead time caused by automatic calibration, and improving an operation rate at which the semiconductor tester tests a DUT. SOLUTION: In the semiconductor tester for implementing the automatic calibration of a test execution section at a predetermined interval at which a stable measurement operation is ensured, the automatic calibration is implemented in parallel with overhead factors other than the automatic calibration. COPYRIGHT: (C)2009,JPO&INPIT
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