| 摘要 |
PROBLEM TO BE SOLVED: To provide an eccentricity measuring device and an eccentricity measuring method capable of suppressing the effect of light reflected on a surface other than a surface to be detected of a body to be inspected on measurement of eccentricity. SOLUTION: The eccentricity measuring device 1 includes: an imaging optical system 7 having a prescribed focal length; a first mask 5 arranged at a position where light before incidence on the body S to be inspected is incident; a second mask 8 arranged at a position where the light after the reflection on the body S to be inspected is incident; and a condensing optical system 9 and a position sensor 10 for detecting the inclination of the light passing through the second mask 8 after the reflection on the body S to be inspected with respect to an optical axis Ax. Any of the first and second masks 5, 8 includes a pattern which comprises a shield part shielding light and a transmission part transmitting light and in which the position of the shield part and the position of the transmission part are inverted by rotating it about the optical axis by 180 degrees. The first and second masks 5, 8 are arranged so that the patterns are rotationally conjugate with each other by 180 degrees along the optical axis Ax. COPYRIGHT: (C)2009,JPO&INPIT
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