| 摘要 |
Provided is a working object grinding method capable of grinding a working object reliably. A modified region forming line is set along the outer edge inside at a predetermined distance from the outer edge of the working object (1) by irradiating a focal point in the working object (1) with a laser beam. Along that modified region forming line, a modified region (7) is formed in the working object (1), and the back (12) of this working object (1) is ground. As a result, the extension of the crack, which has been formed in an outer edge portion (25) due to the grinding of the working object (1), can be suppressed by either that modified region (7) or the crack (C1) extending from the modified region (7), so that the working object (1) can be prevented from being cracked. |
