METHOD FOR MANUFACTURING SENSING UNIT MADE FROM NANO-SIZED RESIST-DERIVED CARBON
摘要
<p>Provided is a method for manufacturing a sensor portion of a biosensor used in detecting biomolecules. The method includes the steps of: applying a photo- sensitive material on a substrate; lithographically etching the photo- sensitive material to form a nano-size sensor portion precursor; and pyrolyzing the sensor portion precursor to form a sensor portion composed of conductive carbon.</p>
申请公布号
WO2009069846(A1)
申请公布日期
2009.06.04
申请号
WO2007KR06802
申请日期
2007.12.24
申请人
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;LEE, SEUNG SEOB;LEE, JUNG A;LEE, KWANG CHEOL;PARK, SE IL
发明人
LEE, SEUNG SEOB;LEE, JUNG A;LEE, KWANG CHEOL;PARK, SE IL
