| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic multilayer substrate improved in reliability. SOLUTION: The method of manufacturing the ceramic multilayer substrate includes: a step of drawing a liquid pattern on a green sheet GS by discharging a dispersed system of conductive particulates Is containing a dispersion assistant Ib to a green sheet GS in the form of drops of liquid; a step of forming a dry pattern PD by vaporizing a dispersion medium from the liquid pattern; and a step of stacking and pressing the green sheet GS having the dry pattern PD to form a pressed body and baking the pressed body to form the LTCC multilayer substrate, wherein the dry pattern PD is cleaned before the green sheet GS is stacked using cleaning liquid 31 which dissolves the dispersion assistant Ib and does not dissolve the conductive particulates Is. COPYRIGHT: (C)2009,JPO&INPIT |
