| 摘要 |
PROBLEM TO BE SOLVED: To properly perform aberration correction processings, according to the determination results, after determining whether the surface of the inspecting object is a perfectly diffusing plane. SOLUTION: A shutter 22 controls the transmission of light flux (light reflected from the inspecting object) at the pupil surface. Specifically, from a fully open state, the all area of the pupil face is able to transmit light flux changes to a right-half opening state, the right half of the pupil is able to transmit the light flux, or changes to the left-half opening state, the left half of the pupil is able to transmit the light flux continuously. Accordingly, a first image to a third image are taken. An aberration correction part 33 performs aberration correction processing, by reading a proper correction table from the correction table memory part 34. The present invention is able to adopt, as an measuring device for measuring the 3D profile of the inspection object by a trigonometric survey by using aslit light. COPYRIGHT: (C)2009,JPO&INPIT
|
