| 摘要 |
A piezoelectric pump capable of generating a large displacement at a central portion of a piezoelectric element even when a driving voltage is relatively low and preventing short-circuits caused by migration. The piezoelectric pump includes a pump body with a pump chamber, and a piezoelectric element that closes the pump chamber. The central area and the peripheral area of the piezoelectric element are bent in opposite directions by applying voltages to the piezoelectric element so that the volume of the pump chamber is changed. The piezoelectric element is a laminate including a plurality of piezoelectric layers with electrodes interposed therebetween. The central area and the peripheral area of each piezoelectric layer are polarized opposite to each other in the thickness direction, and the electrodes are formed such that voltages in the same direction in the thickness direction are applied to the central area and the peripheral area of each piezoelectric layer. Since voltages at the same potential are applied to the electrodes formed in the same planes of the piezoelectric layers, short-circuits caused by migration can be prevented. |
