摘要 |
PROBLEM TO BE SOLVED: To provide a valve structure of a constant pressure valve for a fluid supply system, without damaging a diaphragm regardless of a secondary side pressure fluctuation. SOLUTION: This valve structure of the constant pressure valve 100 is arranged in a fluid supply line 2 sandwiched between first and second diaphragm pumps 5 and 35. The constant pressure valve 100 is formed with an air chamber 143 by being partitioned into a primary side flow passage chamber 141 narrow in the pressure receiving area on the lower side of a valve plate part 111 in a state of installing a valve element 110 in a housing 130, a secondary side flow passage chamber 142 wide in the pressure receiving area on the upper side of the valve plate part, and first and second diaphragms 121 and 122. The primary side flow passage chamber 141 is provided with a plug member 145 oppositely to a through-flow passage 115. The secondary side flow passage chamber 142 is provided with an upward movement regulating member 146 for regulating the upward movement of the valve element 110 by abutting on the valve plate part 111 when the valve plate part 111 tries to move upward by exceeding a predetermined quantity. COPYRIGHT: (C)2009,JPO&INPIT |