| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an acceleration sensor that prevents adhesion of a movable electrode to a fixed electrode. SOLUTION: Sten films 8 for reducing the attractive force for adhesion are formed on side surfaces of the movable electrode 1, fixed electrodes 2a and 2b, and a frame part 7. When the movable electrode 1 and fixed electrodes 2a and 2b are formed of silicon substrates, as the sten films 8, an insulation films having irregular binding between silicon atoms and oxygen atoms and irregular binding between silicon atoms and nitrogen atoms are used, for example. When such sten films 8 are formed, even if Coulomb force works between both electrodes in joining the silicon substrate to a back side substrate 4 using positive electrode joining method, adhesion of the movable electrode 1 to the fixed electrode 2a and 2b can be suppressed. COPYRIGHT: (C)2009,JPO&INPIT
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