| 摘要 |
PROBLEM TO BE SOLVED: To align probe cards and the like to electronic devices with a simple and low cost mode. SOLUTION: In order to conduct electrical inspection of an electronic device by getting each probe apical end contact with each electrode of the electronic device concerned to be inspected, respectively, the probe card is presented deploying the plurality of the probes depending on the number of the electrodes of the electronic device. In order to implement alignment between the probe apical end and the electrode, a probe is arranged for alignment with higher pressure than other probes to the electrode. For example, by making the diameter of the probe for alignment to be larger than that of other probes, the pressure to the electrode can be heightened to other probes. COPYRIGHT: (C)2009,JPO&INPIT
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