| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus capable of shortening the total time for self-diagnosis. SOLUTION: The semiconductor testing apparatus has a TSC (tester controller) for performing self-diagnosis of a plurality of devices while testing an object and detects breakdown of the devices. The TSC includes: a calibration performing means for calibrating the plurality of devices; a diagnosis performing means for diagnosing the plurality of devices calibrated by this calibration performing means; a control part for controlling the calibration performing means and the diagnosis performing means; and a plurality of BUSY lines that are installed on the plurality of devices respectively and connected to the TSC. COPYRIGHT: (C)2009,JPO&INPIT
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