| 摘要 |
PROBLEM TO BE SOLVED: To provide a microchip having a structure capable of evaluating quantitatively a crushing degree of a pattern shape of a fluid circuit, namely, the length in the microchip thickness direction of the pattern shape, and its using method. SOLUTION: In this microchip formed by laminating the first substrate equipped with a groove provided on the substrate surface with the second substrate, and having a fluid circuit inside comprising the groove and the first substrate side surface of the second substrate, the first substrate is equipped with an evaluation part for evaluating the length in the microchip thickness direction in a partial fluid circuit in the fluid circuit, and the evaluation part has a penetration part comprising a through-hole penetrating in the thickness direction of the first substrate, and a step part provided adjacently to the penetration part, and the height of the step part is the same or approximately the same as the depth of the groove constituting the partial fluid circuit. Its using method is also provided. COPYRIGHT: (C)2009,JPO&INPIT
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