发明名称 NEW CARBONYL-BRIDGED ATHENE-BASED COMPOUND AND METHOD FOR PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a new athene-based compound precursor efficiently producing a highly regular electroconductive thin film according to a simple method. SOLUTION: The carbonyl-bridged athene-based compound is represented by general formula (1) äwherein, Z represents -C(=O)-; m and n represent each an integer of≥0; and R<SB>1</SB>and R<SB>2</SB>represent each independently any of H, a 1-30C alkyl, a 1-30C halogenated alkyl, a 6-30C aryl, a 4-30C heteroaryl, a 1-30C alkoxy, a 6-30C aryloxy, a 3-30C trialkylsilyl, or a halogen}. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009120570(A) 申请公布日期 2009.06.04
申请号 JP20070298258 申请日期 2007.11.16
申请人 SHARP CORP;DAITO CHEMIX CORP 发明人 HANATO HIROYUKI;NAKAGAWA MASATOSHI;NAKAYAMA YOSHINORI;SORANAKA KAZUYUKI;KITAGAWA ATSUSHI
分类号 C07C49/665;C07C1/207;C07C15/20;C07C15/38;C07C29/10;C07C35/44;C07C35/52;C07C45/29;C07C49/697;H01L51/05;H01L51/30;H01L51/40 主分类号 C07C49/665
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