摘要 |
PROBLEM TO BE SOLVED: To provide a new athene-based compound precursor efficiently producing a highly regular electroconductive thin film according to a simple method. SOLUTION: The carbonyl-bridged athene-based compound is represented by general formula (1) äwherein, Z represents -C(=O)-; m and n represent each an integer of≥0; and R<SB>1</SB>and R<SB>2</SB>represent each independently any of H, a 1-30C alkyl, a 1-30C halogenated alkyl, a 6-30C aryl, a 4-30C heteroaryl, a 1-30C alkoxy, a 6-30C aryloxy, a 3-30C trialkylsilyl, or a halogen}. COPYRIGHT: (C)2009,JPO&INPIT
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