发明名称 SOAKING HIGH-SPEED ELEVATOR PIT
摘要 PROBLEM TO BE SOLVED: To provide a soaking high-speed elevator pit which improves efficiency in heating/cooling an object to be heated, fastens heating and cooling, reduces temperature non-uniformity of the object to be heated and hardly carries dust, generated from a housing under high-temperature environment, to the object to be heated. SOLUTION: A soaking high-speed elevator pit is configured to heat an object 8 to be heated housed within a housing 3 in a longitudinal tubular shape by disposing a heater 2 inside the housing 3. A tubular inner tube 5 is provided inside the housing 3, the heater 2 is disposed between this inner tube 5 and the housing 3, and an interval between the inner tube 5 provided with the heater 2 and the housing 3 is used as a cooling gas passage 6, and a tubular heat reflection panel 4 is provided inside the housing 3. The heat reflection panel 4 is constituted of insulating silicon carbide. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009124005(A) 申请公布日期 2009.06.04
申请号 JP20070297771 申请日期 2007.11.16
申请人 SUKEGAWA ELECTRIC CO LTD 发明人 MIURA KUNIAKI;ASAHA MAKOTO
分类号 H01L21/324;C23C16/46;H01L21/22;H01L21/31 主分类号 H01L21/324
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