| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a metal oxide film which can obtain a metal oxide film having low crystallinity. SOLUTION: In the method for producing a metal oxide film where a solution for forming a metal oxide film in which, as a metal source, a metal salt or an organometallic compound is dissolved is contacted with a base material heated to a temperature more than a metal oxide film forming temperature, so as to obtain a metal oxide film on the base material, the solution for forming a metal oxide film comprises a boron compound reducing the crystallinity of the metal oxide film. COPYRIGHT: (C)2009,JPO&INPIT
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