| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a holding pad capable of inhibiting a drop in flatness of an object to be ground and easily being attached to/detached from a surface plate. <P>SOLUTION: The holding pad 1 has a film 2 made of polyurethane resin. The film 2 has an approximately flat holding surface P in contact with the object to be ground. Four double-sided adhesive tapes 7 are stuck to the surface opposite to the holding surface P of the film 2. Each of the tapes 7 has an adhesive layer 7b on both surfaces of a basic material 7a made of a polyethylene terephthalate film. The respective tapes 7 are formed in the approximately same thickness. Each of the tapes 7 has one of adhesive layers 7b stuck to the film 2 and the other adhesive layer 7b covered with release coated paper 7c. The tapes 7 can be sequentially stuck to a grinder or peeled therefrom. <P>COPYRIGHT: (C)2009,JPO&INPIT |
