发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To reduce GIDL which is caused by a high electric field in a semiconductor device without decreasing its driving capability. <P>SOLUTION: A gate electrode 108 includes a first conductive part 108A which is positioned in the center of the direction of channel length of the gate electrode 108 and contacts a high permittivity film 107, namely a gate insulating film and a second conductive parts 108B which are positioned at both ends of the direction of channel length of the gate electrode 108 and contacts the high permittivity film 107, namely the gate insulating film. A first work function of the first conductive part 108A and a second work function of the second conductive part 108B are different. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009123944(A) 申请公布日期 2009.06.04
申请号 JP20070296739 申请日期 2007.11.15
申请人 PANASONIC CORP 发明人 HIGUCHI YUICHI
分类号 H01L29/78;H01L21/28;H01L29/423;H01L29/49 主分类号 H01L29/78
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