发明名称 |
POSITIVE PHOTOSENSITIVE RESIN COMPOSITION |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alkali-developable positive photosensitive resin composition that is capable of forming a superior relief pattern, after development and after heat curing. <P>SOLUTION: The positive photosensitive resin composition comprises (A) 100 parts by mass of a polymer which is an alkali-soluble phenolic resin, polyhydroxystyrene or polyhydroxystyrene derivative; (B) 1-100 parts by mass of a photosensitive diazonaphthoquinone compound; (C) 10-30 parts by mass of a crosslinking agent; (D) 0.1-30 parts by mass of at least one acid derivative compound selected from compounds represented by the formulae of group (1); and (E) 100-1,000 parts by mass of an organic solvent. <P>COPYRIGHT: (C)2009,JPO&INPIT |
申请公布号 |
JP2009122588(A) |
申请公布日期 |
2009.06.04 |
申请号 |
JP20070299138 |
申请日期 |
2007.11.19 |
申请人 |
ASAHI KASEI ELECTRONICS CO LTD |
发明人 |
AOKI SAYURI;SASAKI TAKAHIRO |
分类号 |
G03F7/004;G03F7/023;G03F7/40;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|