发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide an alkali-developable positive photosensitive resin composition that is capable of forming a superior relief pattern, after development and after heat curing. <P>SOLUTION: The positive photosensitive resin composition comprises (A) 100 parts by mass of a polymer which is an alkali-soluble phenolic resin, polyhydroxystyrene or polyhydroxystyrene derivative; (B) 1-100 parts by mass of a photosensitive diazonaphthoquinone compound; (C) 10-30 parts by mass of a crosslinking agent; (D) 0.1-30 parts by mass of at least one acid derivative compound selected from compounds represented by the formulae of group (1); and (E) 100-1,000 parts by mass of an organic solvent. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009122588(A) 申请公布日期 2009.06.04
申请号 JP20070299138 申请日期 2007.11.19
申请人 ASAHI KASEI ELECTRONICS CO LTD 发明人 AOKI SAYURI;SASAKI TAKAHIRO
分类号 G03F7/004;G03F7/023;G03F7/40;H01L21/027 主分类号 G03F7/004
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