| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a liquid crystal device with an excellent multi-gap structure. <P>SOLUTION: The manufacturing method of the liquid crystal device, in which a liquid crystal device having a reflective display region and a transmissive display region is manufactured, has: a step to form a switching element on a board constructing a first substrate 10; a step to form an interlayer insulating film by covering the switching element; a step to form a source electrode 15 exposed on the upper surface of the interlayer insulating film and electrically conducted to the electrode of the switching element; a step to form a protective film 16 by covering the interlayer insulating film and the source electrode 15; a step to form a resin film 17a composed of a positive type photosensitive resin by covering the protective film 16; a step to expose the protective film 16 by eliminating the resin film 17a on the source electrode 15; and an etching step to dry-etch the resin film 17a on the transmissive display region T and the protective film 16 on the source electrode 15 by one operation so as to form a projection and recession forming layer 17, and to expose the source electrode 15. <P>COPYRIGHT: (C)2009,JPO&INPIT |
