| 摘要 |
PROBLEM TO BE SOLVED: To provide a dispensing device capable of measuring a flow rate that exceeds a detection range. SOLUTION: The dispensing device is constituted of a liquid transfer tube 3 for transferring liquid from the upstream to the downstream; a flowing path 10 for measurement provided in a part of the liquid transfer tube 3; a flow rate sensor 11 for detecting the flow rate of the liquid flowing in the flow path 10 for measurement; a branching pipe 15 branched at the upstream side of the flowing path 10 for measurement from the liquid transfer pipe 3 and connected on the downstream side; an opening/closing valve 16 provided on the branched pipe 15; and a dispensing head 6 provided downstream of the liquid transfer pipe 15 wherein the opening/closing valve 16 is controlled to be opened of closed according to the flow rate flowing the liquid transfer tube 3 by making a part of the liquid flow shunted to the branching pipe 15, the flow-in amount to the flow path 10 for measuring is set within the detection range of the flow rate sensor 11. COPYRIGHT: (C)2009,JPO&INPIT |
