发明名称 PRESSURE-SENSITIVE ADHESIVE SHEET
摘要 PROBLEM TO BE SOLVED: To provide a pressure-sensitive adhesive sheet which is usable as a dicing tape having sufficient adhesive strength for a ring frame during dicing and easily peeled during tape releasing to leave no pressure-sensitive adhesive waste on a ring frame, and enables a wafer to be mounted as the pressure-sensitive adhesive is imparted to the wafer. SOLUTION: The pressure-sensitive adhesive sheet comprises a pressure-sensitive adhesive layer consisting of a pressure-sensitive adhesive component (a) a thermoplastic resin, (b) a thermopolymerizable component, and (c) a compound producing a base and a radical through irradiation, and (d)≤20 wt.% of a radiation polymerizable compound for the total amount of the pressure-sensitive adhesive component; and a support base material. The softening point of (b) the thermopolymerizable component of the pressure-sensitive adhesive component being≥50°C. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009124096(A) 申请公布日期 2009.06.04
申请号 JP20080079135 申请日期 2008.03.25
申请人 HITACHI CHEM CO LTD 发明人 OKUBO KEISUKE;KATO SHINYA;YUASA TOMOHITO
分类号 H01L21/52;C09J7/02;C09J11/06;C09J133/08;C09J163/00;H01L21/301;H01L21/683 主分类号 H01L21/52
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