| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope device easily obtaining an image with excellent contrast when relaying the pupil of an objective lens, arranging a pupil modulating element onto a pupil conjugate surface and observing a phase object. SOLUTION: This microscope device includes: an infinite microscope objective lens 10, an image formation lens 20 for forming an image from a parallel light flux from the microscope objective lens 10, and a relay optical system 40 which relays light from a primary image 24 of a sample 8 formed by the image formation lens 20 and forms a secondary image 36. The relay optical system 40 has, in order from the primary image 24 side, a first relay lens 41 and a second relay lens 42. A parallel light flux is formed between the first relay lens 41 and the second relay lens 42. An image 29 of an exit pupil 11 of the objective lens is formed between the first relay lens 41 and the second relay lens 42. By combining the image formation lens 20 and the first relay lens 41, the aberration of the image 29 of the exit pupil 11 may be corrected simultaneously with the aberration of the sample image. COPYRIGHT: (C)2009,JPO&INPIT
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