发明名称 Oxide semiconductor thin film transistors and fabrication methods thereof
摘要 Oxide semiconductor thin film transistors (TFT) and methods of manufacturing the same are provided. The methods include forming a channel layer on a substrate, forming source and drain electrodes at opposing sides of the channel layer, and oxidizing a surface of the channel layer by placing an oxidizing material in contact with the surface of the channel layer, reducing carriers on the surface of the channel layer. Due to the oxidizing agent treatment of the surface of the channel layer, excessive carriers that are generated naturally, or during the manufacturing process, may be more effectively controlled.
申请公布号 US2009140243(A1) 申请公布日期 2009.06.04
申请号 US20080219661 申请日期 2008.07.25
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM TAE-SANG;LEE SANG-YOON;RYU MYUNG-KWAN;KWON JANG-YEON;PARK KYUNG-BAE;SON KYUNG-SEOK;JUNG JI-SIM
分类号 H01L29/22;H01L21/34 主分类号 H01L29/22
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