发明名称 THREE-DIMENSIONAL PATTERN FORMING MATERIAL
摘要 <p>A photo-curable composition which attains suppression of scum generation and high close adhesion to a substrate in the step of forming a three-dimensional pattern by photo-imprinting, more particularly, a photo-curable composition for forming a three-dimensional pattern by photo-imprinting, characterized by comprising a photopolymerizable monomer, inorganic nanoparticles provided with a dispersant, and a photo- polymerization initiator. The inorganic nanoparticles have a mean particle diameter of 1 to 1000nm and are made of silica. The dispersant is a silane coupling agent, preferably, a silane coupling agent which contains either an organic group bearing a carbon-carbon unsaturated linkage or an epoxy-containing organic group.</p>
申请公布号 WO2009069557(A1) 申请公布日期 2009.06.04
申请号 WO2008JP71242 申请日期 2008.11.21
申请人 NISSAN CHEMICAL INDUSTRIES, LTD.;HANABATA, MAKOTO 发明人 HANABATA, MAKOTO
分类号 H01L21/027;C08F2/44;C08F292/00 主分类号 H01L21/027
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