ISOTROPES TROCKENÄTZEN EINER INORGANISCHEN ANTI-REFLEX-BESCHICHTUNG NACH ÄTZEN DES POLYSILIZIUM-GATES,申请号DE2001638469-传众专利搜索

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发明名称	ISOTROPES TROCKENÄTZEN EINER INORGANISCHEN ANTI-REFLEX-BESCHICHTUNG NACH ÄTZEN DES POLYSILIZIUM-GATES
摘要
申请公布号	DE60138469(D1)	申请公布日期	2009.06.04
申请号	DE2001638469	申请日期	2001.07.26
申请人	ADVANCED MICRO DEVICES INC.	发明人	BONSER, DOUGLAS J.;PURDY, MATTHEW;HUSSEY, JAMES H.
分类号	H01L21/28;H01L21/3065;H01L29/423;H01L29/49;H01L29/78	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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