| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a discharge surface treatment apparatus which can perform high speed treatment and is friendly to an environment, by positively using a hydroxyl group radical generated from humid discharge under the atmospheric pressure, and a discharge surface treatment method. <P>SOLUTION: The discharge surface treatment apparatus is provided with: discharge parts 10A, 10B having a high voltage electrode 7 and grounding electrodes 12A, 12B disposed facing the high voltage electrode and forming a plasma generation region 18 between the high voltage electrode and themselves with at least one of the high voltage electrode and grounding electrodes covered with a dielectric; a high voltage power source 5 applying high voltage between the high voltage electrode and grounding electrodes; a gas supply part 3 supplying gas to the plasma forming region; and a humidifying device 2 humidifying the gas supplied from the gas supply part 3 by moisturizing the gas. The high voltage electrode 7 is subjected to recessed face working at the end of a processing object side with a curvature radius of 5% or more of a distance C from the high voltage electrode 7 to the grounding electrodes 12A, 12B. <P>COPYRIGHT: (C)2009,JPO&INPIT |
