发明名称 ELECTRO-OPTIC DEVICE, ELECTRONIC INSTRUMENT, MANUFACTURING METHOD OF ELECTRO-OPTIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a highly reliable liquid crystal device where a non-volatile memory and pixel TFT are arranged on the same substrate. SOLUTION: An electro-optic device is provided with a pixel part, a driving circuit driving the pixel part and the non-volatile memory. A switching element in at least the pixel part or the driving circuit is formed on the substrate 10A with the non-volatile memory. A gate insulating film of the switching element comprises a laminated structure of a first insulating film 35, a second insulating film 36 and a third insulating film 38. The non-volatile memory has a memory cell 110a provided with a floating gate electrode 37 disposed on a semiconductor layer 33 through the second insulating film 36 and a control gate electrode 39A installed on the floating gate electrode 37 through the third insulating film 38. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009123877(A) 申请公布日期 2009.06.04
申请号 JP20070295588 申请日期 2007.11.14
申请人 SEIKO EPSON CORP 发明人 KANDA ATSUSHI
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L21/8247;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L29/786
代理机构 代理人
主权项
地址