摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable liquid crystal device where a non-volatile memory and pixel TFT are arranged on the same substrate. SOLUTION: An electro-optic device is provided with a pixel part, a driving circuit driving the pixel part and the non-volatile memory. A switching element in at least the pixel part or the driving circuit is formed on the substrate 10A with the non-volatile memory. A gate insulating film of the switching element comprises a laminated structure of a first insulating film 35, a second insulating film 36 and a third insulating film 38. The non-volatile memory has a memory cell 110a provided with a floating gate electrode 37 disposed on a semiconductor layer 33 through the second insulating film 36 and a control gate electrode 39A installed on the floating gate electrode 37 through the third insulating film 38. COPYRIGHT: (C)2009,JPO&INPIT
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