| 摘要 |
PROBLEM TO BE SOLVED: To provide a corrector plate holding frame for easily holding a corrector plate while preventing the corrector plate from being distorted and achieving the thinning of a device, an interferometer equipped therewith, and a corrector plate holding method. SOLUTION: This holding frame for a corrector plate 24 used to measure aberration of a pick-up lens by means of an interferometer, is characterized by being equipped with: a holding part 22 for holding the corrector plate 24 with its under surface 24a substantially horizontally mounted thereon; and a bendingly deformable presser member 25 for sandwiching the corrector plate 24 between itself and the holding part 22 with three or more projection parts 26 kept in contact with an upper surface 24b of the corrector plate 24 held on the holding part 22. COPYRIGHT: (C)2009,JPO&INPIT |
