| 摘要 |
<p>A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope comprises multiple probes 21, 22, 23, 24 movable in the XYZ-directions, a stage 3 on which a specimen W is placed and that is movable in the XY-directions, a detecting part 6 that detects the physical properties that changes with the movements of each of the probes 21, 22, 23, 24 in the Z-direction according to the surface shape of the specimen W, at a time when each of the probes 21, 22, 23, 24 or the stage 3 is moved in the XY-directions, an image generating part 73 that images the surface image of the specimen W in response to the detected signals from the detecting part 6, and a relative position calculating part 75 that obtains the surface image based on each of the probes 21, 22, 23, 24 and obtained by the image generating part 73, when the stage 3 is moved in the XY-directions without changing a relative position between the probes 21, 22, 23 24 in the XY-directions, and calculates the relative position between the probes 21, 22, 23, 24 by checking the surface images obtained by the probes.</p> |
