| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element having improved piezoelectric characteristics and heat resistance, and to provide an angular velocity sensor and a method of manufacturing the piezoelectric element. <P>SOLUTION: A first electrode film 34a is formed on a substrate and a PZT thin film 33 is formed on the first electrode film 34a, thus forming the piezoelectric element 139. When the PZT thin film 33 is expressed by a chemical formula Pb<SB>1+X</SB>(Zr<SB>Y</SB>Ti<SB>1-Y</SB>)O<SB>3+X</SB>, a PbO excess composition ratio X is not less than 0 and not more than 0.3 and a Zr composition ratio Y is not less than 0 and not more than 0.55. By forming the PZT thin film 33 in this manner, the piezoelectric element 139 having improved piezoelectric characteristics can be obtained. When the Zr composition ratio Y is 0 to 0.5, depolarization does not occur easily and heat resistance is improved. By setting a film thickness to 400 to 1,000 nm, the piezoelectric element 139 having further improved piezoelectric characteristics can be obtained. <P>COPYRIGHT: (C)2009,JPO&INPIT |
