摘要 |
<P>PROBLEM TO BE SOLVED: To output stable vibration energy by suppressing the attenuation of vibration that accompanies its size reduction, using low-cost constitution and thereby improving its efficiency of vibration. <P>SOLUTION: For the vibrator of a linear vibration wave actuator, a piezoelectric elements 15 which have a plurality of piezoelectric layers and electrode layers, and a ceramic board 2 which serves as a vibrating plate, are baked at the same time, thereby becoming integrated. Between the electrode layer 4 of the piezoelectric element 15 and the ceramic board 2, a piezoelectric layer 3, which serves as a compound layer which is of the same component as or whose main component is the same as that of the piezoelectric layer 5, is interposed; and the piezoelectric element 15 and the ceramic board 2 can be jointed together by baking. Moreover, the surface of the electrode layer 6 of the piezoelectric element 15 is covered as a whole, with a compound layer which is of the same component as or whose main component is the same as that of the piezoelectric layer 5. Holes are formed in electrode layers 4 and 6 and are aimed at electrical continuity with the outside (a control unit, and the like). <P>COPYRIGHT: (C)2009,JPO&INPIT |