发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device that includes field-effect transistors having a structure allowing high-density mounting. <P>SOLUTION: The semiconductor device has: a substrate; a first insulating layer provided on the substrate; a conductive layer embedded into the first insulating layer; a pillar-shaped semiconductor part having a lower diffusion layer that is electrically connected with the conductive layer and is disposed just above the conductive layer, a semiconductor layer on the lower diffusion layer, and an upper diffusion layer on the semiconductor layer; a gate insulating film provided at the peripheral lateral side of the semiconductor layer; a gate electrode provided on the gate insulating film; and a second insulating layer provided to embed the gate electrode and the pillar-shaped semiconductor part. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009123882(A) 申请公布日期 2009.06.04
申请号 JP20070295770 申请日期 2007.11.14
申请人 ELPIDA MEMORY INC 发明人 UCHIYAMA HIROYUKI
分类号 H01L29/786;H01L21/28;H01L21/768;H01L21/8234;H01L23/522;H01L27/00;H01L27/088;H01L29/41;H01L29/423;H01L29/49 主分类号 H01L29/786
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