| 摘要 |
PROBLEM TO BE SOLVED: To obtain a homogenizer assembly in which a speckle being a noise component is reduced, and an object to be irradiated is accurately irradiated with laser light without a minute vibration. SOLUTION: The homogenizer assembly comprises: a homogenizer connected to an optical fiber; a minute vibration body which gives minute vibration to the optical fiber; and a fixing means to fix the homogenizer, wherein the coherence of the laser light is reduced and the speckle is reduced by minutely vibrating the optical fiber with the minute vibration body fixed to the optical fiber. The vibration frequency is preferably 30 Hz to 100 kHz. The vibration may be a fixed frequency or a combination of a plurality of fixed frequencies. COPYRIGHT: (C)2009,JPO&INPIT
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