| 摘要 |
PROBLEM TO BE SOLVED: To provide a trapping apparatus that securely and selectively traps only unreacted raw material gas from air exhausted from a treatment chamber. SOLUTION: The trapping apparatus has a housing 50 that contains a heater body 52 made of a thermal conductor formed into a square cylinder similar to and slightly smaller than the housing 50. Inside the heater body 52, a trap body 56 made of a copper plate is housed or mounted so that it can be removed through an aperture at the other end of the housing 50 and the heater body 52, provided that the trap body 56 is formed into a square cylinder similar to and slightly smaller than the heater body 52. A plurality of trap plates 74 is arranged in an axial direction at prescribed intervals so that their four sides are closely attached or connected to four inner walls of the trap body 56. A plurality of vent holes 74a are formed on the entire surface of each trap plate 74. The pore sizes of the vent holes 74a are the largest near an inlet and become smaller toward an outlet. COPYRIGHT: (C)2009,JPO&INPIT
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